Enhanced Performance in Al-Doped ZnO Based Transparent Flexible Transparent Thin-Film Transistors Due to Oxygen Vacancy in ZnO Film with Zn-Al-O Interfaces Fabricated by Atomic Layer Deposition
Enhanced Performance in Al-Doped ZnO Based Transparent Flexible Transparent Thin-Film Transistors Due to Oxygen Vacancy in ZnO Film with Zn-Al-O Interfaces Fabricated by Atomic Layer Deposition
复制标题
由于原子层沉积制备的具有 Zn-Al-O 界面的 ZnO 薄膜中的氧空位，Al 掺杂 ZnO 基透明柔性透明薄膜晶体管的性能增强
DOI：
10.1021/acsami.7b02609
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发表时间：
2017-04-05
影响因子：
9.5
通讯作者：
Qin, Wei
中科院分区：
文献类型：
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作者：
Li, Yang;Yao, Rui;Qin, Wei
采用原子层沉积（ALD）法制备了具有Zn-Al-O界面的ZnO高导电性、光学透明的Al掺杂ZnO （AZO）薄膜。制备的AZO薄膜具有优异的电学和光学性能，具有较高的稳定性和与温敏柔性光电器件的兼容性；filin电阻率低至5.7 X 10(-4) ω。载流子浓度高达2.2 × 10(21) cm（-3）。光学透明度更高。在可见范围内大于80%，并且在PEN衬底上的生长温度低于150℃。与传统的ZnO-Al2O3界面的AZO薄膜相比，我们提出当前AZO薄膜电导率增强的潜在机制是由于Zn-O和Al-O键在Zn-Al-O界面中自由竞争生长模式导致氧空位缺乏。基于该AZO电极的柔性透明晶体管具有良好的三保持电压和I-on/I-off比，有望用于高分辨率，全透明和柔性显示应用。
Highly conductive and optical transparent Al doped ZnO (AZO) thin 'film composed of ZnO with a Zn-Al-O interface was fabricated by therinal atomic layer deposition (ALD) method. The asTrepared AZO thin film exhibits excellent electrical and optical properties with high stability and compatibility with temperature -sensitive flexible photoelectronic devices; filin resistivity is as low as 5.7 X 10(-4) Omega.cm, the carrier concentration is high up to 2.2 X 10(21) cm(-3). optical transparency is greater. than 80% in a visible range, and = the growth temperature is below 150 degrees C on the PEN substrate. Compared with the conventional AZO film containing by a ZnO-Al2O3 interface, we propose that the underlying mechanism of the enhanced electrical conductivity for the current AZO thin film is attributed to the oxygen vacancies deficiency derived from the free competitive growth mode of Zn-O and Al-O bonds in the Zn-Al-O interface. The flexible transparent transistor based on this AZO electrode exhibits a favorable thre$hold voltage and I-on/I-off ratio, showing promising for use in high -resolution, fully transparent, and:flexible display applications.