Fabrication Route for the Production of Coplanar, Diamond Insulated, Boron Doped Diamond Macro- and Microelectrodes of any Geometry
Fabrication Route for the Production of Coplanar, Diamond Insulated, Boron Doped Diamond Macro- and Microelectrodes of any Geometry
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DOI：
10.1021/ac501092y
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发表时间：
2014-06-03
影响因子：
7.4
通讯作者：
Macpherson, Julie V.
中科院分区：
文献类型：
--
作者：
Joseph, Maxim B.;Bitziou, Eleni;Macpherson, Julie V.
高掺杂、掺硼金刚石(BDD)是一种具有巨大潜力的电极材料，但在宏观和微观尺度上制造各种不同几何形状的合适电极，以及不损害BDD材料性能的绝缘材料，带来了技术挑战。在本技术笔记中，提出了一种解决这一问题的新方案，导致在单个和多个可单独寻址的水平上制造由绝缘钻石绝缘的共面宏微尺度BDD电极。使用激光微加工方法，将所需的电极(S)几何形状加工成绝缘金刚石衬底，然后过度生长高质量多晶BDD(PBDD)和抛光，以显示近纳米粗糙度、共面的全金刚石结构。电接触可以使用顶部和底部触点，其中后者是使用激光在BDD背面附近产生非金刚石碳(NDC)的。我们介绍了可单独寻址的环形、带状和圆盘电极的制造，其最小、可重复的控制尺寸为50 PM(仅受所采用的激光系统的限制)。在绝缘金刚石凹槽中生长的pBDD没有NDC，并且在延长的溶剂窗口、电化学可逆性和电容方面具有优异的电化学性能。
Highly doped, boron doped diamond (BDD) is an electrode material with great potential, but the fabrication of suitable electrodes in a variety of different geometries both at the macro- and microscale, with an insulating material that does not compromise the material properties of the BDD, presents technical challenges. In this Technical Note, a novel solution to this problem is presented, resulting in the fabrication of coplanar macro- and microscale BDD electrodes, insulated by insulating diamond, at the single and multiple, individually addressable level. Using a laser micromachining approach, the required electrode(s) geometry is machined into an insulating diamond substrate, followed by overgrowth of high quality polycrystalline BDD (pBDD) and polishing to reveal approximately nanometer roughness, coplanar all-diamond structures. Electrical contacting is possible using both top and bottom contacts, where the latter are defined using the laser to produce non-diamond-carbon (NDC) in the vicinity of the back side of the BDD. We present the fabrication of individually addressable ring, band, and disk electrodes with minimum, reproducible controlled dimensions of 50 pm (limited only by the laser system employed). The pBDD grown into the insulating diamond recesses is shown to be free from NDC and possesses excellent electrochemical properties, in terms of extended solvent windows, electrochemical reversibility, and capacitance.