PDMS microchannels with slanted grooves embedded in three walls to realize efficient spiral flow
PDMS microchannels with slanted grooves embedded in three walls to realize efficient spiral flow
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DOI：
10.1016/j.sna.2004.08.033
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发表时间：
2005-04-13
影响因子：
4.6
通讯作者：
Shoji, S
中科院分区：
文献类型：
--
作者：
Sato, H;Ito, S;Shoji, S
本文提出了一种功能性三维微通道，其顶部和侧壁具有倾斜的微槽。这些微通道可以产生短节距螺旋流，用于有效的混沌混合。我们提出了一种新的制造方法，三维SU-8模具使用两步倾斜背面曝光和额外的两步顶侧曝光。SU-8微通道的宽度和深度为100 μ m。在微通道的顶部和侧壁上形成50 μ m宽和30 μ m深的倾斜凹槽。它们与微通道轴线的取向角为63.5度。结果表明，与单壁倾斜槽微通道相比，三壁倾斜槽微通道实现了短节距螺旋流。由于通道中的液体沿着壁上的凹槽流动，所以倾斜凹槽的间距和位置的最佳设计使得能够在通道中进行有效的螺旋流动。(c)2004 Elsevier B. V.保留所有权利。
This paper presents functional three-dimensional microchannels whose top and side walls have slanted microgrooves. These microchannels can generate short pitch spiral flow for efficient chaotic mixing. We proposed a novel fabrication method for 3-D SU-8 molds using two-step inclined backside exposures and additional two-step top side exposures. The width and depth of the SU-8 microchannel are 100 mu m. Slanted grooves of 50 mu m in width and 30 mu m in depth were patterned on the top and the side walls of the microchannel. Their orientation angle was 63.5 degrees with the microchannel axis. It was demonstrated that the microchannel with slanted grooves on three walls achieved short pitch spiral flow compared to the microchannel with slanted grooves on one wall. Since liquid in the channel flows along the grooves on the walls, optimum design of the pitch and placement of the slanted grooves enables efficient spiral flows in the channel. (c) 2004 Elsevier B.V. All rights reserved.