Integrated Optofluidic Iris
Integrated Optofluidic Iris
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DOI：
10.1109/jmems.2012.2196498
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发表时间：
2012-10-01
影响因子：
2.7
通讯作者：
Zappe, Hans
中科院分区：
文献类型：
--
作者：
Mueller, Philipp;Feuerstein, Roland;Zappe, Hans
提出了一种光流控虹膜，该光流控虹膜利用不透明液体的吸收和第二透明液体的吸收来限定可变直径的光学孔径，通过在介质上电润湿直接变形环形液-液界面来调节光流控虹膜。其新颖性不仅在于没有任何可移动的部件或膜，还在于液环的设计，它允许专门使用平面微制造工艺来定义虹膜的所有功能部分。与其他光流控方法相比，该概念结合了超紧凑性、全集成、中等驱动电压(75V)、低功耗(<；5 mW)、高度坚固且可重复的可调性、足够的调谐速度(<；1 S)、高均匀透过率(>；86%)以及适合成像应用的光学质量，以及允许大规模制造的制造工艺。
An optofluidic iris, which uses the absorption of an opaque liquid in combination with a second transparent liquid for defining optical apertures of variable diameters, tuned by directly deforming a ring-shaped liquid-liquid interface using electrowetting on dielectrics, is presented. The novelty lies not only in the absence of any moving parts or membranes but also in the design of the liquid ring, which allows planar microfabrication processes to be used exclusively for defining all functional parts of the iris. When compared to other optofluidic approaches, this concept combines ultracompactness, full integration, moderate drive voltage (75 V), low power consumption (< 5 mW), highly robust and repeatable tunability, adequate tuning speed (< 1 s), high uniform transmission (> 86%), and an optical quality suitable for imaging applications, with a fabrication process which will allow mass fabrication.