Overview on low temperature co-fired ceramic sensors
Overview on low temperature co-fired ceramic sensors
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DOI：
10.1016/j.sna.2015.05.023
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发表时间：
2015-09-01
影响因子：
4.6
通讯作者：
Mueller, Jens
中科院分区：
文献类型：
--
作者：
Jurkow, Dominik;Maeder, Thomas;Mueller, Jens
低温共烧陶瓷是微电子技术的一种。该技术最初是作为印刷电路板（PCB）和经典厚膜技术的替代技术而开发的，并已在电子器件多层陶瓷板的制造中得到应用。该技术的快速和广泛发展使得3D机械结构的制造和各种不同工艺的集成成为可能。LTCC在各种微电子器件的制造中得到了应用。本文介绍了LTCC技术的概况，并对利用LTCC技术制作的物理量传感器进行了详细的总结。(C) 2015 Elsevier B.V.版权所有
Low temperature co-fired ceramics (LTCC) is one of the microelectronic techniques. This technology was initially developed as an alternative to printed circuit boards (PCB) and classical thick-film technology, and it has found the application in the fabrication of multilayer ceramic boards for electronic devices. Fast and wide development of this technology permitted the fabrication of 3D mechanical structures and integration with various different processes. LTCC has found application in the manufacturing of various microelectronic devices. This paper presents an overview on LTCC technology and gives a detailed summary on physical quantity sensors fabricated using LTCC technique. (C) 2015 Elsevier B.V. All rights reserved.