Thermal actuators used for a micro-optical bench: application for a tunable Fabry-Perot filter
Thermal actuators used for a micro-optical bench: application for a tunable Fabry-Perot filter
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用于微型光学工作台的热执行器：可调谐法布里-珀罗滤波器的应用
DOI：
10.1109/sensor.2003.1217041
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发表时间：
2003
期刊：
影响因子：
--
通讯作者：
M. de Labachelerie
中科院分区：
文献类型：
--
作者：
E. Pichonat;M. de Labachelerie
我们报告的热致动器的基础上不对称的热膨胀的两个梁所造成的欧姆加热。由于不同传热方式（如传导、对流和辐射）的介入，使得运动模拟变得复杂。这项工作表明了一个很好的理解过程中的现象焦耳加热过程中的微系统和发展的分析模型和有限元分析。理论和实验结果的比较验证了稳态条件。因此，该驱动器已成功地集成在一个光具座，并允许由一个可移动的硅框架支撑的微透镜的位移。
We report on a thermal actuator based on asymmetrical thermal expansion of two beams caused by ohmic heating. Because of the intervention of the different heat transfer mode (such as conduction, convection and radiation), the motion simulation can be complexed. This work demonstrates a good comprehension of the phenomena during a Joule heating process for micro systems and the development of an analytical model and a finite element analysis. Comparisons between theory and experimental results validate the steady-state conditions. Therefore, this actuator has been successfully integrated in an optical bench and allows the displacement of a micro-lens supported by a movable silicon-frame.