A LC wireless passive temperature-pressure-humidity (TPH) sensor integrated on LTCC ceramic for harsh monitoring
A LC wireless passive temperature-pressure-humidity (TPH) sensor integrated on LTCC ceramic for harsh monitoring
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DOI：
10.1016/j.snb.2018.04.094
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发表时间：
2018-10-01
影响因子：
8.4
通讯作者：
Xiong, Jijun
中科院分区：
文献类型：
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作者：
Tan, Qiulin;Lv, Wen;Xiong, Jijun
在本研究中，提出了一种基于低温共烧陶瓷（LTCC）技术的LC无线无源TPH传感器，用于苛刻的TPH监测。通过HFSS模拟对LC无线无源TPH传感器进行了框架优化，并采用丝网印刷技术、低温共烧工艺、亚胺化工艺在杜邦(R) 951 AT陶瓷上制备。利用扫描电镜（SEM）和傅里叶变换红外光谱（FT-IR）对制备的聚酰亚胺（PI）薄膜进行了显微镜和光谱学表征。实验结果表明，所制备的LC无线无源TPH传感器可以在25 ~ 200℃、70 ~ 220kpa、24 ~ 90% rh的环境下稳定工作，这得益于HFSS仿真优化和我们提出的解决TPH传感器相互关系的算法。压力传感器在64%RH、150℃、70-220 kPa环境下的频移为0.4875 MHz，灵敏度为3.25 kHz/kPa；温度传感器在64%RH、1 atm、25℃（室温）至200℃环境下的频移为1.6 MHz，灵敏度为9.143 kHz/℃。湿度传感器在RT、1 atm、24-90%RH环境下的频移约为7.23 MHz。在低湿度下实现了20 kHz/%RH的灵敏度，在高湿（60-90%RH）下实现了高达200 kHz/%RH的灵敏度。此外，所制备的PI膜对H2S、NH3、CH4具有很高的选择性，这对于一些恶劣环境（如化学医药合成、化学涂装）和矿山环境监测（经常存在CH4和H2S）具有重要意义。因此，本文提出的LC无线无源TPH传感器在变化范围广的TPH环境中表现出稳定的性能，适用于恶劣环境下的TPH同时监测。(C) 2018 Elsevier B.V.版权所有
In this study, a LC wireless passive TPH sensor based on low-temperature co-fired ceramic (LTCC) technology for harsh TPH monitoring was presented. The LC wireless passive TPH sensor was frame-optimized by performing HFSS simulations and fabricated on DuPont (R) 951 AT ceramic using the screen-printing technique, low-temperature co-fired process, imidization process. The microscopy and spectroscopy of as-prepared thin polyimide (PI) film were characterized by the dint of scanning electron microscope (SEM) and fourier transform infrared spectroscopy (FT-IR). The experimental tests indicate the as-prepared LC wireless passive TPH sensor can stably operate at an ambient environment of 25-200 degrees C, 70-220kPa, and 24-90%RH, which attributes to the HFSS simulation optimization and the algorithm we proposed for solving the interrelationship of TPH sensor. The frequency shift of the pressure sensor was 0.4875 MHz with a sensitivity of 3.25 kHz/kPa in the environment of 64%RH, 150 degrees C, 70-220 kPa, while the temperature sensor was 1.6 MHz, 9.143 kHz/degrees C in the environment of 64%RH, I atm, from 25 degrees C (room temperature, RT) to 200 degrees C. Moreover, the humidity sensor, which has the frequency shift of about 7.23 MHz at RT, 1 atm, 24-90%RH, realized a sensitivity of 20 kHz/%RH at low humidity and a sensitivity up to 200 kHz/%RH at high humidity( 60-90%RH). What's more, the as-prepared PI film is highly selective to H2S, NH3, CH4 which is significant for some harsh environments (e.g., chemical & medical synthesis and chemical painting) and mine environmental monitoring (where CH4 and H2S often exist). Therefore, the proposed LC wireless passive TPH sensor, which shows stable performance in a TPH environment with a wide range of variation, is suitable for simultaneous TPH monitoring in harsh environments. (C) 2018 Elsevier B.V. All rights reserved.