Electronic properties of phosphorus doped silicon nanocrystals embedded in SiO2
Electronic properties of phosphorus doped silicon nanocrystals embedded in SiO2
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DOI:
10.1063/1.4915307
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发表时间:
2015-03-16
影响因子:
4
通讯作者:
Zacharias, Margit
中科院分区:
文献类型:
--
作者:
Gutsch, Sebastian;Laube, Jan;Zacharias, Margit
We study the electronic properties of phosphorus doped Si nanocrystal/SiO2 superlattices and determine the carrier concentration by transient current analysis. This is achieved by encapsulating the multilayers between two electrical insulation layers and controlling the carrier mobility by a defined layer to layer separation. A saturation of the voltage dependent ionized carrier density is observed which indicates complete substitutional dopant ionization and allows to calculate the dopant induced charge carrier density. It is found that the doping efficiency of the superlattice is only 0.12% considering the full ionization regime which explains the unusual small dopant effect on transport characteristics. (C) 2015 AIP Publishing LLC.