An analysis of the computer modeling of the flow and temperature fields in an inductively coupled plasma
An analysis of the computer modeling of the flow and temperature fields in an inductively coupled plasma
复制标题
电感耦合等离子体中流场和温度场的计算机建模分析
DOI：
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发表时间：
1985
期刊：
影响因子：
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通讯作者：
M. Boulos
中科院分区：
文献类型：
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作者：
J. Mostaghimi;P. Proulx;M. Boulos
比较了两种不同的算法用于计算感应耦合等离子体中的流场和温度场的性能。第一种算法是基于二维连续性，动量和能量方程的涡量，流函数和焓的解决方案。第二个是基于相同的方程的速度，压力和焓的解决方案。结果表明，数学模型的制定和选择的数值技术可以显着影响的稳定性和收敛性的解决方案。
A comparison is made of the performance of two different algorithms used for the computation of the flow and temperature fields in an inductively coupled plasma. The first algorithm is based on the solutions of the two-dimensional continuity, momentum, and energy equations in terms of vorticity, stream function, and enthalpy. The second one is based on the solution of the same equations in terms of the velocity, pressure, and enthalpy. The results show that the formulation of the mathematical model and the chosen numerical technique can substantially influence the stability and the convergence of the solution.