T.Ohmi: "Proposal for advanced semiconductor manufacturing equipment approach to automated IC manufacturing," Proc., 10th Symp. ULSI Ultra Clean Technology, Advanced Semiconductor Manufacturing, III-1-3 - III-1-26, Tokyo, Nov.(1989).
T.Ohmi: "Proposal for advanced semiconductor manufacturing equipment approach to automated IC manufacturing," Proc., 10th Symp. ULSI Ultra Clean Technology, Advanced Semiconductor Manufacturing, III-1-3 - III-1-26, Tokyo, Nov.(1989).
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T.Ohmi：“关于自动化 IC 制造的先进半导体制造设备方法的提案”，Proc.，第 10 届 Symp。
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