Hydrogen atom yield in RF and microwave hydrogen discharges
Hydrogen atom yield in RF and microwave hydrogen discharges
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射频和微波氢放电中的氢原子产率
DOI：
10.1007/bf01465741
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发表时间：
1994
影响因子：
3.6
通讯作者：
M. Moisan
中科院分区：
文献类型：
--
作者：
L. St;M. Moisan
对纯氢射频放电和微波维持放电中的氢原子产额进行了理论和实验研究。开发了颗粒平衡模型，其提供了H、H2、H+、H2+和H3+物质的浓度。它还表明，该模型的近似解是足够的计算浓度的H原子（所需的，例如，在金刚石膜沉积）在0.1-10微米的范围内。接下来，应用于纯H2放电中的H-原子密度的测定的光化技术的有效性进行检查。使用这种诊断，它是观察到的H-原子浓度降低时，容器壁温度的增加，由于原子氢在壁上的重组效率增加。为了克服这种影响，放电管壁冷却与二甲基聚硅氧烷，低损耗的介电液体。它在2450 MHz下显著提高了氢原子浓度，条件是压力通常低于几个微焦耳，并且功率密度不太高。
The hydrogen atom yield in pure-H2RF and microwave-sustained discharges is investigated both theoretically and experimentally. A particle balance model is developed that provides the concentrations of the H, H2, H+, H2+, and H3+species. It is also shown that an approximate solution of this model is adequate for calculating the concentration of H atoms (required, for instance, in diamond film deposition) in the 0.1–10 torr range. Next, the validity of the actinometry technique applied to the determination of the H-atom density in pure-H2discharges is examined. Using this diagnostic, it is observed that the H-atom concentration decreases when the vessel wall temperature increases, owing to the increased efficiency of atomic hydrogen recombination on the wall. To overcome this effect, the discharge tube wall is cooled off with dimethyl polysiloxane, a low-loss dielectric liquid. It improves significantly the H-atom concentration at 2450 MHz provided the pressure is typically below a few torr and the power density is not too high.