Propagation loss measurement for surface plasmon-polariton modes at metal waveguides on semiconductor substrates

Propagation loss measurement for surface plasmon-polariton modes at metal waveguides on semiconductor substrates
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DOI:
10.1063/1.1645990
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发表时间:
2004-02
影响因子:
4
通讯作者:
Touichiro Goto;Y. Katagiri;H. Fukuda;H. Shinojima;Y. Nakano;Ikutaro Kobayashi;Y. Mitsuoka
Touichiro Goto;Y. Katagiri;H. Fukuda;H. Shinojima;Y. Nakano;Ikutaro Kobayashi;Y. Mitsuoka
中科院分区:
物理与天体物理2区
文献类型:
--
作者:
Touichiro Goto;Y. Katagiri;H. Fukuda;H. Shinojima;Y. Nakano;Ikutaro Kobayashi;Y. Mitsuoka

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测量了半导体衬底上金属波导处表面等离子体激元-偏振子(SPP)模的传输损耗。这种波导是沉积在InP衬底上的Au或Al的简单条带,或者是覆盖在InP衬底上的300 nm厚的SiO_2薄膜。我们使用了一种直接的方法,可以清楚地区分摄像机图像中的SPP模式,从而可以进行定量测量。在波长为1.55μm处测得的损耗系数如理论预测的在8.5-17db/mm范围内,这表明该光波导具有实际应用的可行性。
Propagation losses were measured for surface plasmon-polariton (SPP) modes at metal waveguides on semiconductor substrates. The waveguides are simple strips of Au or Al deposited on InP substrates or 300-nm-thick SiO2 film covering the InP substrates. We used a direct method that can clearly discriminate SPP modes in vidicon-camera images, thereby allowing quantitative measurements. The loss coefficients measured at a wavelength of 1.55 μm were, as predicted by theory, in the range of 8.5–17 dB/mm, which shows the waveguides are feasible for practical applications.