Optimizing the fabrication process of a high-efficiency blazed grating through diamond scribing and molding
Optimizing the fabrication process of a high-efficiency blazed grating through diamond scribing and molding
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DOI：
10.1088/0960-1317/20/5/055028
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发表时间：
2010-05
影响因子：
2.3
通讯作者：
Chabum Lee;T. Kuriyagawa;Do-Kyun Woo;Sun-Kyu Lee
中科院分区：
文献类型：
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作者：
Chabum Lee;T. Kuriyagawa;Do-Kyun Woo;Sun-Kyu Lee
本文介绍了一种最佳热压工艺的实验研究，以防止由金刚石工具干涉划线法制造的化学镀镍模具复制的微结构发生纳米级热变形。从具有闪耀轮廓的模具复制聚合物基PMMA：周期2.0 µm，深度0.2 µm。以成型压力Pm、成型温度Tm和脱模温度Td为实验参数，研究了不同成型条件下的复合材料性能。就复制品的表面光滑度、轮廓、锐边、表面粗糙度和光学性能而言，Pm = 0.9 MPa、Tm = 150 °C和Td = 20 °C的条件下，复制品的表面光滑度、轮廓、锐边、表面粗糙度和光学性能最好。根据光学测试，测得复制品的衍射效率为87.6%，并且在其他条件下模制的复制品由于模制误差而显示出明显的效率下降。
This paper presents the experimental investigation of an optimal hot embossing process to prevent the nanoscale thermal deformation of microstructures replicated from the electroless Ni mold fabricated by the diamond tool-interfered scribing method. A polymer-based PMMA was replicated from the mold with the blazed profile: period 2.0 µm and depth 0.2 µm. The molding conditions, the applying pressure (Pm), molding temperature (Tm) and demolding temperature (Td) were chosen as experiment parameters. In terms of the quality of surface smoothness, profile, sharp edge, surface roughness and optical performance of the replica, the conditions, Pm = 0.9 MPa, Tm = 150 °C and Td = 20 °C, showed a best results. From optical testing, diffraction efficiency of the replica was measured, 87.6%, and the replica molded in other conditions showed a noticeable efficiency drop due to the molding error.