The controlled deposition of metal oxides onto carbon nanotubes by atomic layer deposition: examples and a case study on the application of V2O4 coated nanotubes in gas sensing
The controlled deposition of metal oxides onto carbon nanotubes by atomic layer deposition: examples and a case study on the application of V2O4 coated nanotubes in gas sensing
复制标题
DOI：
10.1039/b821555c
复制
发表时间：
2009-01-01
影响因子：
3.3
通讯作者：
Pinna, Nicola
中科院分区：
文献类型：
--
作者：
Willinger, Marc-Georg;Neri, Giovanni;Pinna, Nicola
采用新的原子层沉积（ALD）工艺在碳纳米管上均匀涂覆多种过渡金属氧化物薄膜（氧化钒、氧化钛和氧化铪）。所提出的方法改编自非水溶胶-凝胶化学，并利用金属醇盐和羧酸作为前体。它允许在管的内表面和外表面涂覆厚度可控的高度保形薄膜，从而生产高表面积混合材料。通过电子显微镜和电子能量损失光谱技术的结合，证明了薄膜的形貌、化学成分以及高纯度。此外，为了强调所获得的混合物的可能应用，报告了基于混合氧化钒涂层碳纳米管（V2O4-CNT）的电阻式气体传感器的电学和传感性能，并研究了热处理对气体传感性能的影响。
A new atomic layer deposition (ALD) process was applied for the uniform coating of carbon nanotubes with a number of transition-metal oxide thin films (vanadium, titanium, and hafnium oxide). The presented approach is adapted from non-aqueous sol-gel chemistry and utilizes metal alkoxides and carboxylic acids as precursors. It allows the coating of the inner and outer surface of the tubes with a highly conformal film of controllable thickness and hence, the production of high surface area hybrid materials. The morphology and the chemical composition as well as the high purity of the films are evidenced through a combination of electron microscopic and electron-energy-loss spectrometric techniques. Furthermore, in order to highlight a possible application of the obtained hybrids, the electrical and sensing properties of resistive gas sensors based on hybrid vanadium oxide-coated carbon nanotubes (V2O4-CNTs) are reported and the effect of thermal treatment on the gas sensing properties is studied.