Simple process for fabricating a monolithic polymer optical waveguide.
Simple process for fabricating a monolithic polymer optical waveguide.
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DOI：
10.1364/ol.30.000970
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发表时间：
2005-05
期刊：
影响因子：
3.6
通讯作者：
T. Matsui;K. Komatsu;O. Sugihara;T. Kaino
中科院分区：
文献类型：
--
作者：
T. Matsui;K. Komatsu;O. Sugihara;T. Kaino
提出并论证了一种简单、经济的聚合物单片光波导的制备工艺，即不同材料连续接枝。采用微转移模塑法制备了具有波导芯槽的包层。在选择性曝光之前将环氧树脂溶液旋涂到包层上以形成透明波导芯。然后旋涂光学功能聚合物溶液以形成串联接枝的波导结构。因此，两种类型的聚合物填充凹槽以实现单片集成波导。通过控制凹槽形状，可以获得平坦的表面。两种聚合物之间的低连接损耗，小于0.01分贝/点，获得。
A simple and economical fabrication process for a monolithic polymer optical waveguide in which different materials are serially grafted is proposed and demonstrated. A cladding layer with a waveguide core groove is fabricated by microtransfer molding. An epoxy resin solution is spin coated onto the cladding before selective photoexposure to form a transparent waveguide core. An optical functional polymer solution is then spin coated to form a serially grafted waveguide structure. Thus two types of polymer fill the groove to realize a monolithically integrated waveguide. Controlling the groove shape results in a flat surface. A low connection loss between the two polymers, less than 0.01 dB/point, is obtained.