Fundamental Study on Multi-wire EDM Slicing of SiC by Wire Electrode with Track-shaped Section
Fundamental Study on Multi-wire EDM Slicing of SiC by Wire Electrode with Track-shaped Section
复制标题
轨道形断面线电极多线电火花切割SiC的基础研究
DOI：
10.1016/j.procir.2013.03.052
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发表时间：
2013
期刊：
影响因子：
--
通讯作者：
T. Yamauchi
中科院分区：
文献类型：
--
作者：
Atsushi Kimura;Y. Okamoto;A. Okada;J. Ohya;T. Yamauchi
碳化硅锭的切片需要高效、精确的切片方法。新开发的多丝电火花切割方法可以减小切缝宽度和加工表面产生的裂纹。然而，为了减少金属丝振动和实现更小的切口宽度，需要更高的金属丝张力。圆截面细线电极在高导线张力条件下没有足够的横截面积。为此，提出了一种截面呈轨道状的线材电极，并将其应用于碳化硅锭的线材电火花切割。实验研究了轨道形截面线电极的运行控制。采用带固定板的侧支撑方法，采用轨道形截面镀黄铜钢丝电极减小切口宽度。平行拉丝式导线和侧支撑夹具板的近距离设置点可以减小轨道形截面焊条的振动，减小切口宽度。
High efficient and precise slicing method is required for the slicing of silicon carbide ingot. The newly developed multi-wire electrical discharge slicing method would decrease the kerf width and the cracks generated on machined surface. However, much higher wire tension is required in order to reduce wire vibration and to perform a smaller kerf width. Thin wire electrode with round section does not have enough cross sectional area under the high wire tension condition. Therefore, a wire electrode with track- shaped section was proposed and applied to the wire EDM slicing of silicon carbide ingot. The running control of wire electrode with track-shaped section was experimentally investigated. The side support method with fixture plates could decrease the kerf width by brass coated steel wire electrode with track-shaped section. The parallel drawing type traverser and the short distance setting points of side support fixture plates could perform the smaller vibration of w ire electrode with track-shaped section and the decrease of kerf width.