1.5-Mbit/s direct readout of line-and-space patterns using a scanning near-field optical microscopy probe slider with air-bearing control
1.5-Mbit/s direct readout of line-and-space patterns using a scanning near-field optical microscopy probe slider with air-bearing control
复制标题
使用具有空气轴承控制的扫描近场光学显微镜探针滑块以 1.5 Mbit/s 的速度直接读取线和空间图案
DOI：
10.1063/1.125590
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发表时间：
2000
影响因子：
4
通讯作者：
S. Hosaka
中科院分区：
文献类型：
--
作者：
F. Issiki;Kenchi Ito;K. Etoh;S. Hosaka
我们通过使用具有空气轴承控制的扫描近场光学显微镜 (SNOM) 探针滑块，演示了旋转磁盘上 0.25 μm 线与空间 (L&S) 图案的 1.5 Mbit/s 信号读出。通过将聚焦光直接照射到金字塔形探针尖端，探针的透光率大大增加。与使用锥形光纤探头的现有 SNOM 系统相比，信号的比特率提高了两个数量级。 0.25 μm L&S 图案的信号对比度、信噪比和载噪比分别为 19%、17 dB 和 37 dB。探针的估计分辨率极限对应于 ~130 nm 的 L&S 宽度。
We have demonstrated 1.5-Mbit/s signal readout of a 0.25 μm line-and-space (L&S) pattern on a rotating disk by using a scanning near-field optical microscopy (SNOM) probe slider with air-bearing control. The light transmittance of the probe was greatly increased through direct irradiation of a focused light to a pyramidal probe tip. The bit rate of the signal was enhanced by two orders of magnitude compared to that of existing SNOM systems that use a tapered-fiber probe. The signal contrast, signal-to-noise ratio, and carrier-to-noise ratio for the 0.25 μm L&S pattern were 19%, 17 dB, and 37 dB, respectively. The estimated resolution limit of the probe corresponded to a L&S width of ∼130 nm.