A study of oxidation behavior of AlTiN-and AlCrN-based multilayer coatings
A study of oxidation behavior of AlTiN-and AlCrN-based multilayer coatings
复制标题
DOI：
10.1016/j.surfcoat.2017.10.078
复制
发表时间：
2018-01-15
影响因子：
5.4
通讯作者：
Wang, Qimin
中科院分区：
文献类型：
--
作者：
Xiao, Baijun;Li, Haixu;Wang, Qimin
本文采用电弧离子镀技术在Al_2O_3和硬质合金衬底上制备了AlTiN/TiSiN和AlCrN/TiSiN多层膜。用扫描电子显微镜(X-SEM)、能谱分析(EDX-MAPS)、X射线衍射仪(X-射线衍射仪)和线扫描能谱(EDX)研究了AlTiN/TiSiN多层膜在800℃、900℃和1000℃空气中氧化2 h后的氧化行为。相反，AlCrN/TiSiN涂层的氧化膜主要由(Ti，Al)混合氧化膜外层和致密的(Al，Cr)(2)O-3内层组成。在等温氧化过程中，AlCrN/TiSiN涂层的增重较小。氧化结果表明，AlCrN/TiSiN多层涂层比AlTiN/TiSiN涂层具有更好的抗氧化性能。TiSiN涂层下形成致密的保护性(Al，Cr)混合氧化膜，起到阻挡Al、Ti、Cr原子向外扩散和阻止氧向内扩散的作用。
In this work, AlTiN/TiSiN and AlCrN/TiSiN multilayer coatings were deposited by arc ion plating on Al2O3 and cemented carbide substrates. The oxidation resistances of the coatings were studied under isothermal conditions up to 1000 degrees C. The oxidation behaviors of the multilayer coatings were studied by means of cross-sectional SEM (X-SEM), energy dispersive X-ray (EDX) maps analysis, X-ray diffraction (XRD) and EDX line-scanning after oxidation at 800 degrees C, 900 degrees C and 1000 degrees C in air for 2 h. The oxide scale formed on the surface region of the AlTiN/TiSiN coating illustrates a mixture of porous (Al, Ti)-Oxide scale. On the contrary, the oxide scale of the AlCrN/TiSiN coating mainly consists of a mixed (Ti, Al)-oxide scale outside layer and a dense (Al, Cr)(2)O-3 inner layer. During the isothermal oxidation, the AlCrN/TiSiN coating exhibits lower weight increment. The oxidation result shows that the AlCrN/TiSiN multilayer coating exhibits more considerable oxidation resistance than that of the AlTiN/TiSiN coating. The formation of a dense protective mixed (Al, Cr)-oxide scale beneath the TiSiN layer acts as a barrier layer, blocking the outward diffusion of the Al, Ti and Cr atoms and retarding inward diffusion of oxygen into the AlCrN/TiSiN coating.