Wafer-Scale Fabrication of Single Polypyrrole Nanoribbon-Based Ammonia Sensor
Wafer-Scale Fabrication of Single Polypyrrole Nanoribbon-Based Ammonia Sensor
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DOI：
10.1021/jp102858w
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发表时间：
2010-07-01
影响因子：
3.7
通讯作者：
Myung, Nosang V.
中科院分区：
文献类型：
--
作者：
Chartuprayoon, Nicha;Hangarter, Carlos M.;Myung, Nosang V.
采用自顶向下的“光刻”和自底向上的“电沉积”相结合的改进的光刻图纹纳米线电沉积（LPNE）技术，在4英寸硅片和柔性聚酰亚胺薄膜上批量合成了超长（bbb1cm）聚吡啶（PPy）纳米带。过度的长度和平版印刷方法使直接器件制造的电极的后续图案成为可能。通过温度相关的测量来研究电输运性质，并进行背门控场效应管测量来研究相对于PPy纳米带电导率的性质。为了证明这种方法的实用性，这些纳米带装置被用作电导方式的气体传感器。它们对氨蒸汽表现出极好的灵敏度，检测限在ppm以下。通过化学脱掺杂使PPy纳米带的导电性得到调整，从而对氨蒸汽的敏感性得到提高。
Ultra-long (>1 cm) polypyrrole (PPy) nanoribbons were batch-synthesized to predetermined locations on 4 inch Si wafers and flexible polyimide film with controlled thicknesses and widths via modified Lithographically Patterned Nanowire Electrodeposition (LPNE), which combines top-down "photolithography" and bottom-up "electrodeposition". The excessive lengths and lithographic approach enable subsequent patterning of electrodes for direct device fabrication. Electrical transport properties were investigated by temperature-dependent measurements, and back-gated FET measurements were performed to study the properties with respect to the conductivity of PPy nanoribbons. To demonstrate the utility of this approach these nanoribbon devices were interrogated as gas sensors in a conductometric fashion. They displayed excellent sensitivity toward ammonia vapor with a detection limit in the sub ppm. The sensitivity toward ammonia vapor was tuned by the conductivity of the PPy nanoribbons via chemical de/doping.