Design and development of a cutting force sensor based on semi-conductive strain gauge
Design and development of a cutting force sensor based on semi-conductive strain gauge
复制标题
DOI：
10.1016/j.sna.2015.11.017
复制
发表时间：
2016-01-01
影响因子：
4.6
通讯作者：
Hu, Tengjiang
中科院分区：
文献类型：
--
作者：
Zhao, You;Zhao, Yulong;Hu, Tengjiang
为了优化应变式传感器灵敏度与固有频率之间的矛盾，提出了一种基于半导电应变片的切削力传感器。为了提高固有频率，设计了一种新的相互垂直的八角形环传感元件（TMPOR）；采用MEMS（微机电系统）技术制作的半导电应变片，由于其具有较高的测量因子（GF），从而提高了传感器的灵敏度。静态标定实验结果表明，半导体应变片的灵敏度比传统金属箔应变片提高了16倍，证明了利用MEMS技术解决上述矛盾的可行性。模态冲击试验表明，该传感器主方向固有频率为771 Hz，满足了其在高速加工中的应用。在动态切削力测量试验中，所研制的传感器对动态切削力信号的检测能力令人满意。总的来说，基于MEMS技术的传感器在解决当前切削力传感器研究中灵敏度与固有频率之间的技术缺陷方面具有很大的潜力。(C) 2015 Elsevier B.V.版权所有
A kind of cutting force sensor based on semi-conductive strain gauge is proposed in this paper in order to optimize the contradiction between sensitivity and natural frequency of strain-gauge type sensors. A new sensing element of two mutual-perpendicular octagonal rings(1) (TMPOR) is developed to improve natural frequency; and semi-conductive strain gauge that fabricated by MEMS (micro-electro-mechanical system) technique is used to enhance sensitivity of the sensor due to its higher gauge factor (GF). Static calibration experiment results show that semi-conductive strain gauge has improved the sensitivity by 16 times than traditional metal foil strain gauge, which proves the feasibility of settling the contradiction aforementioned by using MEMS technique. Modal impact test indicates that the natural frequency of the fabricated sensor is 771 Hz in primary direction, which fulfills its most application in high speed machining process. During dynamic cutting force measurement test, the developed sensor exhibits satisfying ability in dynamic cutting force signal detection. Generally, the MEMS technique based sensor shows great potential in solving technical defect between sensitivity and natural frequency in current cutting force sensor research. (C) 2015 Elsevier B.V. All rights reserved.