Design, Analysis and Fabrication of SAF AM, A 4 DOF Assembled Microrobot
Design, Analysis and Fabrication of SAF AM, A 4 DOF Assembled Microrobot
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4 DOF 组装式微型机器人 SAF AM 的设计、分析和制造
DOI：
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发表时间：
2018
期刊：
影响因子：
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通讯作者：
D. Popa
中科院分区：
文献类型：
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作者：
Ruoshi Zhang;Danming Wei;D. Popa
本文提出了一种新型的三维微机器人--固体关节四轴微机器人（sAFAM）。该微型机器人是对之前微型机器人的进化改进，利用面外柔性机械结构的微组装。原有的AFAM是由两个面内MEMS X-Y工作台通过环氧电缆与面外装配臂耦合驱动的微机器人，本文设计了sAFAM，用可装配到面内X-Y工作台的单体臂代替电缆牵引系统，简化了装配过程的复杂性，提高了微机器人的装配精度。采用有限元分析（FEA）对所提出的结构进行了模拟， imes 47 μ m imes 18 外{S} μ m$工作空间，在致动过程中适当的应力集中，以及减少的运动之间的耦合的微型机器人自由度。制造和组装过程进行了讨论和实验证明，结果密切匹配模拟。sAFAM具有作为扫描电子显微镜（SEM）或原子力显微镜（AFM）中的辅助微/纳米操作工具的潜力。
In this paper we present a new type of 3-dimensional microrobot, the Solid Articulated Four Axes Microrobot (sAFAM). This microrobot is an evolutionary improvement of a previous microrobot utilizing microassembly of out-of-plane compliant mechanical structures. The original AFAM was a microrobot driven by two coupled in-plane MEMS X-Y stages, through an epoxied cable to an out-of-plane assembled arm. In this paper, sAFAM was designed to replace the cable traction system with an unibody arm that can be assembled into the in-plane X-Y stages, which simplifies the assembly process complexity and improves the microrobot precision. The proposed structure was simulated with finite element analysis (FEA), resulting in a $22mu m imes 47mu m imes 18 ext{S}mu m$ workspace, appropriate concentration of stresses during actuation, and reduced motion coupling between the microrobot degrees of freedom. Fabrication and assembly processes are discussed and demonstrated experimentally, and results closely match simulations. sAFAM has the potential to be used as an assist $mathbf{micro}/mathbf{nano}$ manipulation tool in the scanning electron microscope (SEM) or the atomic force microscope (AFM).