The Crystallization Behavior of (Sr,Ba)Nb 2 O 6 Thin Films Prepared by a Hybrid Metalorganic Decomposition
The Crystallization Behavior of (Sr,Ba)Nb 2 O 6 Thin Films Prepared by a Hybrid Metalorganic Decomposition
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杂化金属有机分解制备(Sr,Ba)Nb 2 O 6 薄膜的结晶行为
DOI:
10.1080/00150190211228
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发表时间:
2002
期刊:
影响因子:
0.8
通讯作者:
S. Cho
中科院分区:
文献类型:
--
作者:
D. G. Lee;H. Lee;H. Lee;Jeong;S. Cho
Strontium barium niobate (SBN) thin films with a nominal composition of Sr x Ba 1 m x Nb 2 O 6 (x=0.3, 0.5, 0.7) were prepared by a hybrid metalorganic decomposition process in which the complex solution was spin-coated onto Si(100) and fused silica substrates and heat-treated at temperatures between 650 and 900°C. Uniform and stable solutions were obtained from Sr-neodecanoate, Ba-neodecanoate and Nb-ethoxide, using a mixture of xylene and 2-methoxyethanol as the solvent. It was found that single phase SBN films with tetragonal tungsten bronze structure could be obtained at an annealing temperature as low as 700°C.