High resonance frequency force microscope scanner using inertia balance support
High resonance frequency force microscope scanner using inertia balance support
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DOI：
10.1063/1.2951594
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发表时间：
2008-06
影响因子：
4
通讯作者：
T. Fukuma;Yasutaka Okazaki;N. Kodera;T. Uchihashi;T. Ando
中科院分区：
文献类型：
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作者：
T. Fukuma;Yasutaka Okazaki;N. Kodera;T. Uchihashi;T. Ando
我们利用一种“惯性平衡支撑”的压电支撑机制，开发出了在z轴方向具有540kHz高共振频率的原子力显微镜扫描器。在这种方法中，一个立方压电驱动器在垂直于伸缩轴的四个侧面被支撑，通过这种方式，扫描器的共振频率在自由振动时能保持与驱动器一样高。该扫描器在±15V的低电压下就能实现330nm的实际z轴扫描范围。我们证明了该扫描器可用于液体中云母的真实原子分辨率成像。
We have developed the atomic force microscope scanner with the high resonance frequency of 540kHz in the z axis using a piezosupport mechanism “inertia balance support.” In the method, a cubic piezoactuator is supported at the four sides perpendicular to the extension axis, by which the resonance frequency of the scanner remains as high as that of the actuator in the free vibration. The scanner allows driving at low voltage ±15V for the practical z scan range of 330nm. We demonstrate the applicability of the scanner to the true-atomic-resolution imaging of mica in liquid.