Fabrication and magnetic control of Y3Fe5O12 cantilevers
Fabrication and magnetic control of Y3Fe5O12 cantilevers
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DOI：
10.1063/1.4979553
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发表时间：
2017-03
影响因子：
4
通讯作者：
Y. Seo;K. Harii;R. Takahashi;H. Chudo;K. Oyanagi;Z. Qiu;T. Ono;Y. Shiomi;E. Saitoh
中科院分区：
文献类型：
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作者：
Y. Seo;K. Harii;R. Takahashi;H. Chudo;K. Oyanagi;Z. Qiu;T. Ono;Y. Shiomi;E. Saitoh
我们已经制造了铁氧体悬臂梁，其中它们的振动特性可以由外部磁场控制。采用聚焦离子束刻蚀技术结合物理刻蚀的方法制备了Y3Fe5O12薄膜的亚微米级悬臂梁结构。我们发现，悬臂梁表现出两种共振模式，分别对应于水平和垂直振动。在外部磁场下，水平模式的谐振频率增加，而垂直模式的谐振频率降低，定量与我们的数值模拟的磁力一致。共振频率随磁场的变化达到百分之几，表明实现了对共振频率的有效磁控制。
We have fabricated ferrite cantilevers in which their vibrational properties can be controlled by external magnetic fields. Submicron-scale cantilever structures were made from Y3Fe5O12 films by physical etching combined with the use of a focused ion beam milling technique. We found that the cantilevers exhibit two resonance modes which correspond to horizontal and vertical vibrations. Under external magnetic fields, the resonance frequency of the horizontal mode increases, while that of the vertical mode decreases, quantitatively consistent with our numerical simulation for magnetic forces. The changes in resonance frequencies with magnetic fields reach a few percent, showing that an efficient magnetic control of resonance frequencies was achieved.