Self-Aligned Top-Gate Nanocrystalline Silicon Thin Film Transistors with Source/Drain Regions Activated by Diode-Pumped Continuous-Wave Green laser
Self-Aligned Top-Gate Nanocrystalline Silicon Thin Film Transistors with Source/Drain Regions Activated by Diode-Pumped Continuous-Wave Green laser
复制标题
二极管泵浦连续波绿光激光激活的具有源极/漏极区域的自对准顶栅纳米晶硅薄膜晶体管
DOI:
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发表时间:
2008
期刊:
影响因子:
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通讯作者:
K. Kitahara
中科院分区:
文献类型:
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作者:
W. Sato;A. Hara;S. Kurauch;Y. Doi;M. Kobata;K. Kitahara