Polymer imprint lithography with molecular-scale resolution
Polymer imprint lithography with molecular-scale resolution
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DOI：
10.1021/nl048355u
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发表时间：
2004-12-01
期刊：
影响因子：
10.8
通讯作者：
Shim, A
中科院分区：
文献类型：
--
作者：
Hua, F;Sun, YG;Shim, A
我们表明，小直径，单壁碳纳米管可以作为模板进行聚合物压印光刻与功能尺寸小至2纳米-相当于一个单独的分子的大小。由这种不寻常类型的模板提供的特征的临界尺寸中的埃级均匀性提供了系统地研究在这种分子尺度下的压印光刻的分辨率的独特能力。使用用于模具和模制材料的几种聚合物配方的实验的集体结果表明，交联的密度是影响该过程中的最终分辨率的重要分子参数。经过优化的材料可在此单个纳米范围内实现可靠、重复的图案化。
We show that small diameter, single-walled carbon nanotubes can serve as templates for performing polymer imprint lithography with feature sizes as small as 2 nm - comparable to the size of an individual molecule. The angstrom level uniformity in the critical dimensions of the features provided by this unusual type of template provides a unique ability to investigate systematically the resolution of imprint lithography at this molecular scale. Collective results of experiments with several polymer formulations for the molds and the molded materials suggest that the density of cross-links is an important molecular parameter that influences the ultimate resolution in this process. Optimized materials enable reliable, repetitive patterning in this single nanometer range.