Stylus Tip-Size Effect on the Calibration of Periodic Roughness Specimens with Rectangular Profiles | NIST
Stylus Tip-Size Effect on the Calibration of Periodic Roughness Specimens with Rectangular Profiles | NIST
复制标题
触针尖端尺寸对矩形轮廓周期性粗糙度样本校准的影响
DOI：
--
复制
发表时间：
2012
期刊：
影响因子：
--
通讯作者：
Jun
中科院分区：
文献类型：
--
作者：
T. Renegar;J. Soons;B. Muralikrishnan;J. Villarrubia;X. Zheng;T. Vorburger;Jun
触针仪器广泛用于表面表征。众所周知，触针尖端的尺寸和形状会影响测量的表面几何形状和参数。在大多数情况下，增加尖端尺寸会降低测量的Ra值，因为扩大的尖端不会与尖锐谷的底部接触。然而，即使当尖端可以到达谷的底部时，尖端尺寸也可以对测量的Ra值具有显著且有时违反直觉的影响。本文分析了测头半径对具有平坦凹谷的矩形轮廓周期性粗糙度试样测量的影响。矩形轮廓粗糙度试样用作ASME B46-2009和ISO 5436-1：2000标准中描述的C型参考试样。对于这些轮廓，尖端半径对测量Ra的影响受峰宽与谷宽之比的影响。如果矩形轮廓峰的宽度大于轮廓谷，则测量的Ra小于真实的表面的Ra，并且随着尖端尺寸的增加而减小。然而，如果测量的峰的宽度小于测量的谷的宽度，则测量的Ra大于真实的表面的Ra，并且随着尖端尺寸的增加而增加。尖端半径对Ra的影响导致系统偏移。即使在尖端半径小于用于抑制噪声和尖端半径影响的低通数字截止滤波器的情况下，该偏移也可能大于测量不确定度。我们显示的理论分析，模拟和实验的结果。结果提出的问题，是否测量的表面纹理参数应进行校正的尖端尺寸的影响。
Stylus instruments are widely used for surface characterization. It is well known that the size and shape of the stylus tip affects the measured surface geometry and parameters. In most cases, increasing the tip size decreases the measured Ra value because the enlarged tip does not come into contact with the bottom of sharp valleys. However, even when the tip can reach the bottom of the valleys, the tip size can have a significant, and at times counter-intuitive, effect on the measured Ra value. In this paper we analyze the effect of stylus tip radius on the measurement of periodic roughness specimens having rectangular profiles with flat valleys. Rectangular profile roughness specimens function as Type C reference specimens described in the ASME B46-2009 and ISO 5436-1:2000 standards. For these profiles, the effect of tip radius on measured Ra is affected by the ratio of the peak width to the valley width. If the width of a rectangular profile peak is larger than the profile valley, the measured Ra is smaller than the Ra of the real surface and decreases with increasing tip sizes. However, if the measured width of a peak is smaller than the measured width of a valley, the measured Ra is larger than the Ra of the real surface and increases with increasing tip sizes. The effect of tip radius on Ra results in a systematic offset. This offset can be larger than the measurement uncertainty, even in cases where the tip radius is smaller than the low-pass digital cutoff filter used to suppress noise and tip radius effects. We show results of theoretical analyses, simulations, and experiments. The results raise questions as to whether the measured surface texture parameters should be corrected for tip-size effects.