Design and characterization of artificial haircell sensor for flow sensing with ultrahigh velocity and angular sensitivity
Design and characterization of artificial haircell sensor for flow sensing with ultrahigh velocity and angular sensitivity
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DOI：
10.1109/jmems.2007.902436
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发表时间：
2007-10-01
影响因子：
2.7
通讯作者：
Liu, Chang
中科院分区：
文献类型：
--
作者：
Chen, Nannan;Tucker, Craig;Liu, Chang
我们报告了一个人工毛细胞（AHC）传感器的设计灵感来自生物毛细胞的发展。该传感器由一个硅悬臂梁与高纵横比纤毛连接在远端。传感是基于硅压阻应变计在悬臂的基础上。纤毛是由光可定义的SU-8环氧树脂，可以高达700 μ m。在本文中，我们专注于流量传感应用。我们已经表征了AHC传感器在水中和空气中的性能。对于水下应用，我们的特点是传感器在两种流动条件下：稳态层流（直流流）和振荡流（交流流）。在水中交流流动下的传感器的检测极限被实验确定为低于1 mm/s。对于传感器在空气中的偏航响应，最佳情况下的角分辨率也达到了2.16度。
We report the development of an artificial haircell (AHC) sensor with design inspired by biological haircells. The sensor consists of a silicon cantilever beam with a high-aspect-ratio cilium attached at the distal end. Sensing is based on silicon piezoresistive strain gauge at the base of the cantilever. The cilium is made of photodefinable SU-8 epoxy and can be up to 700-mu m tall. In this paper, we focus on flow-sensing applications. We have characterized the performance of the AHC sensor both in water and in air. For underwater applications, we have characterized the sensor under two flow conditions: steady-state laminar flow (dc flow) and oscillatory flow (ac flow). The detection limit of the sensor under ac flow in water is experimentally established to be below 1 mm/s. A best case angular resolution of 2.16 degrees is also achieved for the sensor's yaw response in air.