MEMS/NEMS based on mono-, nano-, and ultrananocrystalline diamond films
MEMS/NEMS based on mono-, nano-, and ultrananocrystalline diamond films
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DOI：
10.1557/mrs.2014.98
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发表时间：
2014-06
期刊：
影响因子：
5
通讯作者：
A. Sumant;O. Auciello;M. Liao;O. Williams
中科院分区：
文献类型：
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作者：
A. Sumant;O. Auciello;M. Liao;O. Williams
金刚石由于其独特的物理、化学和电学性质以及以薄膜形式生长的可行性，是制造可靠、长寿命、微机电/纳机电系统（MEMS/NEMS）的理想材料。然而，各种实际挑战，包括晶圆级厚度均匀性，CMOS兼容性，表面微加工，更重要的是，控制金刚石薄膜的内应力，使这种材料对MEMS工程师更具挑战性。最近的进展，使用化学气相沉积金刚石薄膜的生长已经改变了这一景观，因为大多数技术障碍已被克服，使一个新时代的金刚石为基础的MEMS和NEMS的发展。本文讨论了几个例子的MEMS和NEMS设备已制造使用单晶，纳米，超纳米金刚石薄膜以及它们的性能。
Diamond, because of its unique physical, chemical, and electrical properties and the feasibility of growing it in thin-film form, is an ideal choice as a material for the fabrication of reliable, long endurance, microelectromechanical/nanoelectromechanical systems (MEMS/NEMS). However, various practical challenges, including wafer-scale thickness uniformity, CMOS compatibility, surface micromachining, and, more importantly, controlling the internal stress of the diamond films, make this material more challenging for MEMS engineers. Recent advances in the growth of diamond films using chemical vapor deposition have changed this landscape since most technical hurdles have been overcome, enabling a new era of diamondbased MEMS and NEMS development. This article discusses a few examples of MEMS and NEMS devices that have been fabricated using mono-, nano-, and ultrananocrystalline diamond films as well as their performance.