A novel integrable microvalve for refreshable Braille display system

A novel integrable microvalve for refreshable Braille display system
复制标题

一种用于可刷新盲文显示系统的新型可集成微阀

DOI:
10.1109/jmems.2003.811754
复制
发表时间:
2003
期刊:
IEEE\/ASME Journal of Microelectromechanical Systems
影响因子:
--
通讯作者:
M. Huff
M. Huff
中科院分区:
--
文献类型:
--
作者:
L. Yobas;D. Durand;G. Skebe;F. Lisy;M. Huff

文献摘要

被引文献

相似文献

我们推出了一种新型可集成静电微阀,旨在实现气动可刷新盲文显示系统 (RBDS)。微阀的物理设计参数(例如孔口尺寸、光束长度、光束数量和光束轮廓)经过实验探索,发现有希望与 RBDS 一起使用。特别地,一种孔口为 70 /spl mu/m/spl 倍/70 /spl mu/m、光束长度为 665 /spl mu/m、光束计数为 20 的设计,在施加 68 V-rms 电压的情况下,以静电方式闭合,抵抗 82.7 kPa 的压差。还介绍了在流体和固体域耦合解决方案上建立的微型阀的稳态力学模型。模型和实验测试结果已用于计算未知流量系数、弹性挠度和入口压力。该模型表明,一些设计的流量系数和入口压力非常低,这意味着即使在相当大的供应压力下,压力损失也主要发生在入口处和入口周围。讨论了有关微型阀实际使用的实验观察结果。
We introduce a novel integrable and electrostatic microvalve for the purpose of enabling a pneumatic refreshable Braille display system (RBDS). Physical design parameters of the microvalve such as orifice size, beam length, number of beams and beam profile are experimentally explored and found promising for use with the RBDS. Particularly, one design with an orifice of 70 /spl mu/m/spl times/70 /spl mu/m, beam length of 665 /spl mu/m, and beam count of 20 is electrostatically closed against a differential pressure of 82.7 kPa with an applied voltage of 68 V-rms. Also introduced is a steady-state mechanical model of the microvalve established on a coupled solution of fluid and solid domains. The model and experimental test results have been used to calculate the unknown discharge coefficient, elastic deflection, and entrance pressure. The model reveals that some of the designs have remarkably low discharge coefficient and entrance pressure, implying that pressure loss occurs mostly through and around the inlet port even at fairly large supply pressures. Experimental observations concerning the practical use of the microvalve are discussed.