Impact of angle ranges on thickness resolution in thin film reflectometry
Impact of angle ranges on thickness resolution in thin film reflectometry
复制标题
薄膜反射测量中角度范围对厚度分辨率的影响
DOI：
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发表时间：
2009
期刊：
影响因子：
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通讯作者：
A. Koch
中科院分区：
文献类型：
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作者：
F. Hirth;M. Rossner;M. Jakobi;A. Koch
薄膜反射计是在许多工艺中监测薄膜厚度的常用方法。半导体和光学生产行业，例如，需要观察膜厚。光谱反射仪询问是几种方法之一，可以根据分辨率和测量范围的要求通过各种算法进行评估。入射角是这些询问方法的关键参数。光在不同的入射角下，产生不同的光谱反射率函数。这些都是由一个检测器，在这种情况下，一个光谱仪。因此，需要最小化入射到被测物体上的角度范围，以提高膜厚的分辨率。横向分辨率在某些过程中也可能是一个关键参数。横向分辨率是入射角范围的函数，它随着角度范围的增加而增加。这两个关键的事实导致在给定的最大横向分辨率下的角度范围引入的测量误差的估计。一个测量设置的入射角的测量范围，以及一个例子询问的薄膜在不同的入射角。
Thin film reflectometry is a common way to monitor film thicknesses in numerous processes. Semiconductor and optics producing industries, e.g., require film thickness observation. Spectral reflectometry interrogation is one of several methods, which can be assessed by various algorithms depending on resolution and measuring range demands. Incident angle is a crucial parameter to these interrogation methods. Light, under different incident angles, produces different spectral reflectivity functions. These are integrated by a detector, in this case a spectrograph. Therefore, one needs to minimize the range of incident angles onto the measured object in order to increase the resolution of film thickness. Lateral resolution may also be a crucial parameter in some processes. Lateral resolution is a function of the range of incident angle, it increases with increasing angle range. These two crucial facts result in an estimate of measuring error introduced by the angle range under a given maximal lateral resolution. A measuring setup for a range of incident angle measurements is presented, as well as an example interrogation of a thin film under different incident angles.