Preparations of P-and N-doped hydrogenated microcrystalline cubic silicon carbide films by VHF plasma enhanced chemical vapor deposition method for Si thin film solar cells
Preparations of P-and N-doped hydrogenated microcrystalline cubic silicon carbide films by VHF plasma enhanced chemical vapor deposition method for Si thin film solar cells
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VHF等离子体增强化学气相沉积法制备P、N掺杂氢化微晶立方碳化硅薄膜用于硅薄膜太阳能电池
DOI：
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发表时间：
2010
期刊：
影响因子：
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通讯作者：
Shuichi Nonomura
中科院分区：
文献类型：
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作者：
Norimitsu Yoshida;Sho Terazawa;Atsuteru Takeuchi;Nobutaka Yoneyama;Tomo-o Morino;Zhao Jun;Hironori Natsuhara;Shuichi Nonomura
