Novel surface plasmon waveguide for high integration.
Novel surface plasmon waveguide for high integration.
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DOI：
10.1364/opex.13.006645
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发表时间：
2005-08
期刊：
影响因子：
3.8
通讯作者：
Liu Liu-Liu;Zhanghua Han;Sailing He
中科院分区：
文献类型：
--
作者：
Liu Liu-Liu;Zhanghua Han;Sailing He
提出了一种用于高集成度平面光波导电路的新型表面等离子体波导结构。通过在硅衬底上的金属薄膜上刻蚀一个小沟槽，实现了具有高度受限光场的导模。研究了该结构的模式特性。讨论了使用聚合物上包层的必要性。数值计算了两个相邻波导之间的耦合和90 °弯曲。利用本表面等离子体激元波导可以实现急剧弯曲和高集成度。与其他类型的表面等离子体波导相比，该结构易于制作，可实现高集成度。
A novel surface plasmon waveguide structure is proposed for highly integrated planar lightwave circuits. By etching a small trench through a metallic thin film on a silica substrate, a guided mode with highly confined light fields is realized. The mode properties of the proposed structure are studied. The necessity of using a polymer upper-cladding is discussed. The coupling between two closely positioned waveguides and a 90o bending are also studied numerically. Sharp bending and high integration can be realized with the present surface plasmon waveguide. The proposed structure is easy to fabricate as compared with some other types of surface plasmon waveguides for high integration.