14.5% near-normal incidence reflectance of Cr/Sc x-ray multilayer mirrors for the water window
14.5% near-normal incidence reflectance of Cr/Sc x-ray multilayer mirrors for the water window
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DOI：
10.1364/ol.28.002494
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发表时间：
2003-12-15
期刊：
影响因子：
3.6
通讯作者：
Birch, J
中科院分区：
文献类型：
--
作者：
Eriksson, F;Johansson, GA;Birch, J
采用离子辅助磁控溅射沉积法制备的Cr/Sc多层反射镜在波长a = 3.11 nm处，在掠掠角为87.5°处，具有较高的近法向反射率R = 14.5%，比已有的结果提高了31%以上。弹性后坐力检测分析表明，反射镜含有多达15个at。软X射线反射率模拟显示界面宽度sigma = 0.34 nm，层厚漂移非常小，在整个堆栈中近似于1.6 X 10(-5) nm/多层周期。仿真结果表明，如果能够消除杂质和层厚漂移，则反射率R = 25.6%。在Cr和Se溅射沉积过程中，离子辅助形成了突变界面，离子能量为24 eV，离子与金属的通量比为7.1和23.1。此外，还验证了激光等离子体源cvi发射线（λ = 3.374 nm）的近正入射反射率为5.5%。(C) 2003年美国光学学会。
Cr/Sc multilayer mirrors, synthesized by ion-assisted magnetron sputter deposition, are proved to have a high near-normal reflectivity of R = 14.5% at a grazing angle of 87.5degrees measured at the wavelength A = 3.11 nm, which is an improvement of more than 31% compared with previously published results. Elastic recoil detection analyses show that the mirrors contained as much as 15 at. % of N and traces of C and O. Soft x-ray reflectivity simulations reveal interface widths of sigma = 0.34 nm and an exceptionally small layer thickness drift of similar to1.6 X 10(-5) nm/multilayer period throughout the stack. Simulations show that a reflectivity of R = 25.6% is attainable if impurities and layer thickness drift can be eliminated. The abrupt interfaces are achieved with ion assistance with a low ion energy of 24 eV and high ion-to-metal flux ratios of 7.1 and 23.1 during Cr and Se sputter deposition, respectively. In addition, a near-normal incidence reflectivity of 5.5% for the C VI emission line (lambda = 3.374 nm) from a laser plasma source was verified. (C) 2003 Optical Society of America.