Photosensitive sol–gel preparation and micro-patterning of (100)-oriented (Ba0.7Sr0.3)TiO3 film on LaNiO3 electrode
Photosensitive sol–gel preparation and micro-patterning of (100)-oriented (Ba0.7Sr0.3)TiO3 film on LaNiO3 electrode
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DOI：
10.1007/s10971-011-2476-x
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发表时间：
2011-05
影响因子：
2.5
通讯作者：
Yuanqing Chen;Gaoyang Zhao;Junping Gao
中科院分区：
文献类型：
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作者：
Yuanqing Chen;Gaoyang Zhao;Junping Gao
以La（NO3）3·nH 2 O和Ni（CH 3COO）2·4 H2O为原料，以乙二醇甲醚为溶剂制备LaNiO 3溶胶。利用该溶胶，采用溶胶-凝胶法在LaAlO 3单晶衬底上制备了（001）取向的高电导率LNO薄膜。以醋酸钡、醋酸锶和钛酸丁酯为原料，乙酰丙酮和乳酸为化学改性剂，制备了光敏BST溶胶。用BST溶胶在（001）LNO/LAO上制备了a取向BST薄膜。由于BST溶胶的光敏性，涂覆的BST凝胶膜本身可以用作光致抗蚀剂。因此，微图案化的a-取向BST膜通过暴露、浸提和退火BST凝胶膜而获得。LNO/LAO上的a取向BST薄膜电容器具有高介电常数、低介电损耗和低漏电流。
Using La(NO3)3·nH2O and Ni(CH3COO)2·4H2O as starting materials, the LaNiO3sol was prepared with 2-methoxyethanol as solvent. Using this sol, (001)-oriented LNO films with high conductivity were prepared on LaAlO3single crystal substrate by sol–gel method. Using barium acetate, strontium acetate, and Ti(OC4H9)4as starting materials, acetylacetone and lactic acid as chemical modifiers, photosensitive BST sol was obtained. Using the BST sol, a-oriented BST films were prepared on (001)LNO/LAO. Due to the photosensitivity of the BST sol, the coated BST gel film itself can be used as photoresist. Thus, micro-patterned a-oriented BST films are obtained by exposing, leaching, and annealing the BST gel film. The a-oriented BST film capacitor on LNO/LAO has a high dielectric constant, a low dielectric loss and a low leakage current.