AlN based microgenerators for powering implantable sensor devices
AlN based microgenerators for powering implantable sensor devices
复制标题
用于为植入式传感器设备供电的氮化镓微型发电机
DOI：
10.1002/pssc.201000503
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发表时间：
2011
期刊：
影响因子：
--
通讯作者：
V. Cimalla
中科院分区：
文献类型：
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作者：
O. Bludau;C. Röhlig;F. Knoebber;L. Kirste;R. E. Sah;R. Driad;W. Pletschen;V. Lebedev;V. Cimalla
在这项工作中，我们报告的微结构制成的AlN作为压电微型发电机在能量收集应用。本文介绍了在Si（001）衬底上溅射AlN薄膜的力学和压电性能的实验结果，以及对制作的微悬臂梁的振动测试结果。研究表明，由于d33压电系数大于5 pm/V，AlN薄膜非常适合集成在悬臂梁结构中，为低功耗传感器网络供电（© 2011 WILEY-VCH Verlag GmbH & Co. KGaA，魏因海姆）。
In this work we report on microstructures made of AlN for the use as piezoelectric microgenerators in energy harvesting applications. Experimental results on the mechanical and piezoelectrical properties of sputtered AlN thin films deposited on Si(001) substrates as well as results on vibrometry of fabricated microcantilevers are presented. It is shown that due to the constant d33 piezo coefficients of > 5 pm/V, AlN films are well suited for the integration in cantilever structures for powering of low-consumption sensor networks (© 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)