Formation of atomically smooth SiO2/SiC interfaces at 120 C by use of nitric acid oxidation method
Formation of atomically smooth SiO2/SiC interfaces at 120 C by use of nitric acid oxidation method
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DOI:
10.1016/j.susc.2005.11.005
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发表时间:
2006-02
期刊:
影响因子:
1.9
通讯作者:
S. Imai;M. Fujimoto;Asuha;Masao Takahashi;H. Kobayashi
中科院分区:
文献类型:
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作者:
S. Imai;M. Fujimoto;Asuha;Masao Takahashi;H. Kobayashi