Moving atmospheric microwave plasma for surface and volume treatment

Moving atmospheric microwave plasma for surface and volume treatment
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移动大气微波等离子体进行表面和体积处理

DOI:
10.1016/s0257-8972(03)00652-2
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发表时间:
2003
影响因子:
5.4
通讯作者:
T. Neumann
T. Neumann
中科院分区:
材料科学1区
文献类型:
--
作者:
J. Ehlbeck;A. Ohl;M. Maaß;U. Krohmann;T. Neumann

文献摘要

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介绍了一种新型的大气压微波维持等离子体表面和体积处理技术。该装置的特点是等离子体的自运动行为及其通过管状电介质结构内部运动的能力。这些特征特别适用于处理大型和热敏物体,例如通过处理塑料瓶的内表面可以证明。等离子体源由典型功率为2-6 kW的磁控管、循环器和用于等离子体操作的特殊波导组成,该波导包括由可移动短路和点火柱终止。该装置可以水平或垂直操作。等离子体的速度可以通过微波功率和循环气体流量来改变。所提出的工作是集中在第一个参数的研究进行等离子体施加器设计的内管治疗。
A new type of atmospheric pressure microwave sustained plasma is introduced for surface and volume treatment. The special characteristic of this device is the self-moving behaviour of the plasma and its ability to move through the inside of tubular dielectric structures. These features are especially suitable for treatments of large and heat sensitive objects as could be demonstrated, e.g. by treatment of inner surfaces of plastic bottles. The plasma source consists of a magnetron of typical power of 2–6 kW, a circulator and a special waveguide for plasma operation including a termination by a movable shortcut and an ignition post. The device can be operated horizontal or vertical. The velocity of the plasma can be changed by microwave power and circulation gas flow. The presented work is focused on the first parameter studies performed on a plasma applicator designed for inner tube treatments.