In situ observation of polycrystalline Si thin films grown using Al-doped ZnO on glass substrate by the Al-induced crystallization

In situ observation of polycrystalline Si thin films grown using Al-doped ZnO on glass substrate by the Al-induced crystallization
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原位观察 Al 掺杂 ZnO 在玻璃基板上通过 Al 诱导晶化生长的多晶 Si 薄膜

DOI:
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发表时间:
2011
期刊:
Jpn. J. Appl. Phys.
影响因子:
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通讯作者:
N.Usami
N.Usami
中科院分区:
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文献类型:
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作者:
M.Jung;A.Okada;T.Saito;T.Suemasu;C.Y.Chung;Y.Kawazoe;N.Usami

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