Prediction of the evolution of the erosion profile in a direct current magnetron discharge
Prediction of the evolution of the erosion profile in a direct current magnetron discharge
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直流磁控管放电中腐蚀轮廓演变的预测
DOI：
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发表时间：
1999
期刊：
影响因子：
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通讯作者：
T. Makabe
中科院分区：
文献类型：
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作者：
K. Okazawa;E. Shidoji;T. Makabe
利用Boltzmann方程和混合模型给出的二维等离子体结构数据库，对不同气压下直流磁控放电鞘层区离子和快中性输运进行了数值模拟。利用离子和快中性粒子入射到靶（阴极）表面的二维能量分布，预测了靶表面腐蚀剖面的演化。我们证实，可以通过假设恒定的溅射产率对应于阴极电压的条件下，利用薄膜沉积过程的低压下，得到一个准确的预测的侵蚀轮廓。
We have performed a simulation of ion and fast neutral transport in the sheath region of a direct current magnetron discharge under different pressures by using the Boltzmann equation and the database from the two-dimensional (2D) results of a plasma structure, which was given by a hybrid model. Evolution of the erosion profile on the target surface has been predicted by using the 2D energy distributions of ions and fast neutrals incident on the target (cathode) surface. We confirmed that an accurate prediction of the erosion profile can be obtained by assuming that the constant sputtering yield corresponds to the cathode voltage under conditions of low pressures that make use of the film deposition processes.