Theoretical structural dependence of optical power density in horizontal slot waveguides using Nb2O5

Theoretical structural dependence of optical power density in horizontal slot waveguides using Nb2O5
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使用 Nb2O5 的水平槽波导中光功率密度的理论结构依赖性

DOI:
10.7567/1347-4065/ab1e3e
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发表时间:
2019
影响因子:
1.5
通讯作者:
T. Nishizawa
T. Nishizawa
中科院分区:
物理与天体物理4区
文献类型:
--
作者:
Y. Hayama;K. Nakatsuhara;T. Ochiai;Masayuki Takeda;T. Nishizawa

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分析了由两层Nb_2O_5和一个窄间隙组成的水平缝隙波导的理论特性。缝隙波导将光强限制在窄的水平缝隙中的低折射率区域中。水平槽波导的峰值光功率密度比传统的脊型波导的峰值光功率密度高约3.8倍。研究了峰值光功率密度与结构参数的关系。此外,还模拟了肋型波导与水平缝隙波导之间的耦合。计算了制造公差对光功率密度的影响,以估计制造公差。作为初步实验,在Nb2O5波导结构中制造水平缝隙。成功地获得了厚度小于30 nm的空气狭缝区域。
We analyzed the theoretical characteristics of horizontal slot waveguides that consist of two Nb2O5 layers and a narrow gap. The slot waveguides strongly confine light in the low index region in the narrow horizontal slot. The obtained peak optical power density of the horizontal slot waveguides is approximately 3.8 times higher than that of the conventional rib-type waveguide. The dependency of the peak optical power density on the structural parameters was investigated. In addition, the coupling between the rib-type waveguides and the horizontal slot waveguide was simulated. The influence of fabrication tolerances for optical power density was calculated in order to estimate the fabrication tolerances. As a preliminary experiment, a horizontal slot in an Nb2O5 waveguide structure was fabricated. An air slot region less than 30 nm thick was successfully obtained.
DOI: 10.1038/nphoton.2009.25
发表时间: 2009-04-01
期刊: NATURE PHOTONICS
影响因子: 35
作者:
Koos, C.;Vorreau, P.;Leuthold, J.
通讯作者: Leuthold, J.