Two dimensional spatial Argon metastable dynamics in HiPIMS discharges
Two dimensional spatial Argon metastable dynamics in HiPIMS discharges
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DOI：
10.1088/0022-3727/49/12/125203
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发表时间：
2016-02
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影响因子：
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通讯作者：
A. Kanitz;A. Hecimovic;M. Böke;J. Winter
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文献类型：
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作者：
A. Kanitz;A. Hecimovic;M. Böke;J. Winter
亚稳态(ArM ？利用扩展可调谐二极管激光吸收光谱装置（TDLAS）在高功率脉冲磁控溅射（HiPIMS）脉冲下研究了>的密度和温度。结合光二极管阵列的光束扩展器用于同时测量ArM ？>过渡。HiPIMS放电以其复杂的物理特性而闻名，例如，在磁场和电场交叉的放电中会出现称为辐条的漂移电离区。通过分析吸收谱线的多普勒频移，我们发现了ArM ？>在E×B ？>方向。然而，这个观测到的方位角速度比报道的离子漂移速度慢3个数量级，比E×B ？漂移速度。这一发现可能是由E×B ？>漂移和背景气体，提供了在E×B ？>方向和中性背景气体。
The spatial and temporal dynamics of the Ar metastable (ArM ?>) density and temperature is studied by an extended Tunable Diode Laser Absorption Spectroscopy set-up (TDLAS) within a High Power Impulse Magnetron Sputtering (HiPIMS) pulse. A beam expander in combination with a photo diode array is used to simultaneously measure the spatial and time resolved absorption profile of an ArM ?> transition. HiPIMS discharges are known for their complex physics, e.g. drifting ionisation zones called spokes, that occur in a discharge with crossed magnetic and electric fields. By analysing the Doppler shift of the absorption line, we found evidence for a small azimuthal velocity of the ArM ?> in E×B ?> direction. However, this observed azimuthal velocity is three orders of magnitude slower than the reported ion drift velocities and four orders of magnitudes slower than the E×B ?> drift velocity. This finding may be caused by the weak coupling between the plasma rotation driven by E×B ?> drift and the background gas, providing an estimate of the coupling between the plasma drifting in E×B ?> direction and the neutral background gas.