Integrated CuO/Pd Nanospike Hydrogen Sensor on Silicon Substrate.
Integrated CuO/Pd Nanospike Hydrogen Sensor on Silicon Substrate.
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DOI：
10.3390/nano12091533
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发表时间：
2022-05-02
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影响因子：
--
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利用飞秒激光在水中的硅衬底上诱导出大面积随机分布的纳米钉作为纳米结构模板。分别采用磁控溅射和真空热蒸发镀膜技术在纳米钉上制备了氧化铜（CuO）和钯（Pd）异质结构纳米薄膜，用于构建p型氢传感器。与传统的高温CuO基气敏元件相比，纳米CuO/Pd异质结构在室温下对氢气具有良好的检测性能。对1%H2的检测灵敏度为10.8%，响应时间为198 s，检出限低至40 ppm，在清洁能源领域具有重要的应用前景。一系列的循环响应特性也证明了CuO/Pd异质结构传感器在室温下对H2具有良好的重复使用性和选择性。我们的室温氢传感器采用无废料的绿色工艺直接在硅衬底上制作，这将极大地促进未来集成氢传感器的电路芯片的制作。
A large area of randomly distributed nanospike as nanostructured template was induced by femtosecond (fs) laser on a silicon substrate in water. Copper oxide (CuO) and palladium (Pd) heterostructured nanofilm were coated on the nanospikes by magnetron sputtering technology and vacuum thermal evaporation coating technology respectively for the construction of a p-type hydrogen sensor. Compared with the conventional gas sensor based on CuO working at high temperature, nanostructured CuO/Pd heterostructure exhibited promising detection capability to hydrogen at room temperature. The detection sensitivity to 1% H2 was 10.8%, the response time was 198 s, and the detection limit was as low as 40 ppm, presenting an important application prospect in the clean energy field. The excellent reusability and selectivity of the CuO/Pd heterostructure sensor toward H2 at room temperature were also demonstrated by a series of cyclic response characteristics. It is believed that our room-temperature hydrogen sensor fabricated with a waste-free green process, directly on silicon substrate, would greatly promote the future fabrication of a circuit-chip integrating hydrogen sensor.
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