Identification of phosphorus in diamond thin films using electron paramagnetic‐resonance spectroscopy

Identification of phosphorus in diamond thin films using electron paramagnetic‐resonance spectroscopy
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使用电子顺磁共振波谱法识别金刚石薄膜中的磷

DOI：
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发表时间：
1994
期刊：
影响因子：
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通讯作者：
R. Hellmer
R. Hellmer
中科院分区：
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文献类型：
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作者：
M. Zvanut;W. Carlos;J. Freitas;K. Jamison;R. Hellmer

文献摘要

被引文献

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本文报道了用电子顺磁共振方法研究在金刚石薄膜沉积过程中注入磷掺杂的金刚石薄膜。标称磷浓度在1016和1017 cm−3之间的样品显示出两条等强度的各向同性谱线，它们之间的距离为27 G。对于核自旋为1/2的物质，如磷，预计会出现双线光谱。中心的对称性和自旋浓度的温度依赖性表明，磷在金刚石中形成替代浅施主。
An electron paramagnetic‐resonance study of diamond films doped by implantation of phosphorus during film deposition is reported. Samples with nominal phosphorus concentration between 1016 and 1017 cm−3 exhibit two isotropic lines of equal intensity separated by 27 G. The double‐line spectrum is expected for a nuclear‐spin 1/2 species such as phosphorus. The symmetry of the center and the temperature dependence of the spin concentration suggest that phosphorus forms a substitutional shallow donor in diamond.