Effects of CH4 flow ratio on the structure and properties of reactively sputtered (CrNbSiTiZr)Cx coatings
Effects of CH4 flow ratio on the structure and properties of reactively sputtered (CrNbSiTiZr)Cx coatings
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DOI：
10.1016/j.matchemphys.2017.08.002
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发表时间：
2017-08
影响因子：
4.6
通讯作者：
Yu-Siang Jhong;Chih-Wei Huang;Su-Jien Lin
中科院分区：
文献类型：
--
作者：
Yu-Siang Jhong;Chih-Wei Huang;Su-Jien Lin
在含 CH4 的 Ar 流下，使用等摩尔 CrNbSiTiZr 合金靶材，通过反应射频磁控溅射成功制备了高熵 (CrNbSiTiZr)Cx 涂层。研究了CH4流量比对(CrNbSiTiZr)Cx涂层的化学成分、显微结构、机械和摩擦学性能的影响。随着 CH4 流量比从 3% 增加到 20%，涂层中的碳含量从 36.7 at% 变化到 87.8 at%。 (CrNbSiTiZr)Cx 涂层显示出简单的 NaCl 型 FCC（面心立方）结构。当基体偏压为-100 V时，在碳含量为36.7 at%时获得了32 GPa的最大硬度。另一方面，碳含量为87.8 at%的高涂层具有优异的耐磨性，其摩擦系数和磨损率分别为0.07和2.0 × 10−7mm3/N·m。
High-entropy (CrNbSiTiZr)Cxcoatings were successfully fabricated by reactive radio-frequency magnetron sputtering using an equimolar CrNbSiTiZr alloy target under CH4-containing Ar flow. The effect of the CH4flow ratio on the chemical composition, microstructure, mechanical and tribological properties of (CrNbSiTiZr)Cxcoatings was investigated. The carbon content in the coatings varied from 36.7 at% to 87.8 at% with an increasing CH4flow ratio from 3% to 20%. The (CrNbSiTiZr)Cxcoatings revealed a simple NaCl-type FCC (face-centered cubic) structure. The maximum hardness of 32 GPa was obtained at the carbon content of 36.7 at% by applying substrate bias of −100 V. On the other hand, the coating with high carbon content of 87.8 at% possessed superior wear resistance, which friction coefficient and wear rate were, respectively, 0.07 and 2.0 × 10−7mm3/N·m.