A survey of vacuum material cleaning procedures: A subcommittee report of the American Vacuum Society Recommended Practices Committee

A survey of vacuum material cleaning procedures: A subcommittee report of the American Vacuum Society Recommended Practices Committee
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DOI:
10.1116/1.577449
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发表时间:
1991-05
期刊:
Journal of Vacuum Science and Technology
影响因子:
--
通讯作者:
Y. Sasaki
Y. Sasaki
中科院分区:
其他
文献类型:
--
作者:
Y. Sasaki

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美国真空协会(AVS)推荐实践委员会的一个小组委员会对超高真空行业和政府实验室实施的清洁程序进行了调查。虽然没有两个组织实行相同的程序,但这些组织之间有足够的共同性,表明有一个健全的基本程序,围绕它已经形成了许多不同的程序。在化学清洗不锈钢的情况下,它是蒸气脱脂,碱性洗涤剂洗涤和/或酸洗,水冲洗,然后加热干燥。介绍了样品组织所采用的各种金属和非金属的机械清洗、化学清洗和热清洗方法,并作了评论。小组委员会认识到,不同的情况需要不同的清洁程序。出于这个原因,它的目的是传播信息,以便人们可以制定自己最适合自己情况的程序,而不是推荐一种单一的程序,认为它是最好的普遍程序。
A subcommittee of the American Vacuum Society (AVS) Recommended Practices Committee has conducted a survey of the cleaning procedures practiced by the ultrahigh vacuum industry and government laboratories. Although no two organizations practiced identical procedure, there was sufficient commonality among those canvassed to suggest that there is a sound basic procedure around which many variations have evolved. In the case of chemical cleaning of stainless steel, it is vapor degreasing, alkaline detergent washing and/or acid cleaning, water rinsing, and then heat drying. Various methods of mechanical, chemical, and thermal cleaning of metals and nonmetals practiced by sample organizations are presented with commentary. The Subcommittee recognizes that different situations call for different cleaning procedures. For this reason it aims to disseminate information so that one may formulate his own procedure best suited to his situation, rather than to recommend a single procedure as the best universally.