MEMS Flow Sensor Using Suspended Graphene Diaphragm With Microhole Arrays
MEMS Flow Sensor Using Suspended Graphene Diaphragm With Microhole Arrays
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DOI：
10.1109/jmems.2018.2874231
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发表时间：
2018-12-01
影响因子：
2.7
通讯作者：
Dong, Liang
中科院分区：
文献类型：
--
作者：
Wang, Qiugu;Wang, Yifei;Dong, Liang
这封信报道了一种微型流量传感器，它使用石墨烯和氮化硅的悬浮复合膜，该膜含有一系列微型通孔。当流体流动通过这些微孔时，复合膜的石墨烯层由于石墨烯的压阻效应而受到应力以改变其电阻。石墨烯中微孔的创建使传感器的动态范围从5 m/s到56 m/s的空气流速。该传感器还具有类似于7 x 10（-8）（m/s）（-1）的空气流速灵敏度。
This letter reports a miniature flow sensor using a suspended composite membrane of graphene and silicon nitride containing an array of microscale through-holes. As a fluid flow passes through these microholes, the graphene layer of the composite membrane is stressed to change its electrical resistance due to the piezoresistive effect of graphene. The creation of the microholes in graphene allows for a wide dynamic range of the sensor from 5 to 56 m/s of air flow velocity. The sensor also exhibits an air flow rate sensitivity of similar to 7 x 10(-8) (m/s)(-1).