A pneumatically actuated full in-channel microvalve with MOSFET-like function in fluid channel networks
A pneumatically actuated full in-channel microvalve with MOSFET-like function in fluid channel networks
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DOI：
10.1109/jmems.2002.803414
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发表时间：
2002-10-01
影响因子：
2.7
通讯作者：
Sawada, K
中科院分区：
文献类型：
--
作者：
Takao, H;Ishida, M;Sawada, K
介绍了一种适用于集成微流控系统的压电驱动硅微阀。该微阀的所有端口都是通道内的，并且可连接到微流体系统中的任何表面流体通道。该微型阀通过由控制压力致动的玻璃和硅隔膜之间的受控间隙来控制流体流动。此外，膜片也会因微型阀的出口压力而变形。由于该特征，该微阀显示出饱和的流速，就像MOSFET在饱和区操作一样。对所制作的微阀器件进行了评价，特别关注MOSFET和微阀之间的相似关系。通过控制压力很好地控制了诸如空气和去离子水的流体。当控制压力超过其“阈值压力”时，流体开始在微型阀中流动。“在特性中没有观察到由于膜片粘附而引起的滞后。随着出口压力的增加，微型阀的空气流量逐渐饱和，正如预期的那样。通过评价，这种微阀和MOSFET之间的相似关系已被实验证明。这种微阀不仅可以用作微流体系统中的流量控制器件，还可以用作晶体管器件等微气动回路中的有源器件。
In this paper, a pneumatically actuated silicon microvalve applicable to integrated microfluidic systems is presented. All the ports of this microvalve are in-channel, and connectable to any surface fluid channels in microfluidic systems. This microvalve controls fluid flow by means of the controlled gap between glass and silicon diaphragm actuated by a control pressure. In addition, the diaphragm is also deformed by the outlet pressure of the microvalve. Due to the feature, this microvalve shows saturation of flow rate like MOSFET's operated at saturation region. The fabricated microvalve device was evaluated especially focusing on analogous relationship between MOSFET and the microvalve. Fluids such as air and DI-water were well controlled by the control pressure. Fluid starts to flow in the microvalve when the control pressure exceeds its "threshold pressure." Hysteresis due to sticking of diaphragm was not observed in the characteristics. Air flow rate of the microvalve was gradually saturated with the increasing of the outlet pressure as expected. Through the evaluation, analogous relationship between this microvalve and MOSFET has been experimentally demonstrated. This microvalve can be used as not only flow control devices in micro fluidic systems but also as active devices in micro pneumatic circuits like transistor devices.