Mems Reservoir Computing Using Frequency Modulated Accelerometer
Mems Reservoir Computing Using Frequency Modulated Accelerometer
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使用调频加速度计进行 Mems 储层计算
DOI：
10.1109/mems51670.2022.9699777
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发表时间：
2022
期刊：
影响因子：
--
通讯作者：
T. Tsuchiya
中科院分区：
文献类型：
--
作者：
Takahiro Mizumoto;Y. Hirai;Amit Banerjee;T. Tsuchiya
我们开发了一种具有数据处理能力的低功耗智能MEMS传感器，用于数据采集和转换。它允许在传感设备处进行数据处理，以实现高效的分布式处理。我们采用了一种在单个器件结构中集成了传感和计算功能的MEMS储能器。在本研究中，我们设计了一种调频电容式加速度计，并对其频率响应特性进行了测试。将测量的响应用于时间序列预测的仿真，并成功地演示了机器学习任务。
We developed an intelligent MEMS sensor with data processing ability for data acquisition and conversion at low power consumption. It enables data processing at the sensing device for efficient distributed processing. We employed a MEMS reservoir which integrates sensing and computing functions in single device structure. In this research we designed a frequency modulated capacitive accelerometer and characterized its frequency response. The measured response was used for simulation of time series prediction and the machine learning task was successfully demonstrated.