A soft microfabricated capacitive sensor for high dynamic range strain sensing
A soft microfabricated capacitive sensor for high dynamic range strain sensing
复制标题
用于高动态范围应变传感的软微制造电容传感器
DOI：
10.1109/iros.2016.7759819
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发表时间：
2016
期刊：
影响因子：
--
通讯作者：
S. Bergbreiter
中科院分区：
文献类型：
--
作者：
Hee;A. Charalambides;I. Penskiy;S. Bergbreiter
这项工作展示了一种全弹性MEMS电容式应变传感器，具有高动态范围(5000：1)，并具有廉价的成型微制造工艺。该传感器由嵌入在介质中的导电弹性梳状电容器组成。开发了两种不同的传感器设计，即横向梳状(LC)和横向梳状(TC)，以评估传感器灵敏度随载荷方向的变化。这两种传感器的间距均为30μm，长度为4 mm，深度为65μm。建立了一个线弹性分析模型来预测电容随应变的变化，实验结果与理论预测吻合较好。观测到的应变响应具有很高的线性度和动态范围，滞后可以忽略不计。LC和TC传感器的应变分辨率分别为100μ应变和500μ应变，最高可达50%应变。
This work demonstrates an all-elastomer MEMS capacitive strain sensor with high dynamic range (5000:1), and features an inexpensive molding microfabrication process. The sensor is comprised of conductive elastometric comb capacitors embedded in a dielectric. Two different sensor designs, lateral combs (LC) and transverse combs (TC), were developed to evaluate sensor sensitivity as a function of load orientation. Both sensors have combs with a gap of 30 μm, length of 4 mm, and depth of 65 μm. A linear elastic analytical model was developed to predict change in capacitance as a function of strain, and experimental results show a reasonable agreement with the theoretical predictions. The observed strain responses have high linearity and dynamic range, and negligible hysteresis. The strain resolution of the LC and TC sensors is 100 μstrain and 500 μstrain, respectively, tested up to 50% strain.
影响因子：
7.8
作者：
Wood, Robert J.
通讯作者：
Wood, Robert J.